Organic matter surface treatment cavity structure

The utility model discloses an organic matter surface treatment cavity structure which comprises a main body cavity, a process reaction upper cavity part, a process reaction lower cavity part and a gas pipeline part, the process reaction upper chamber part comprises an upper baffle plate, a side baf...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG XIN, JIANG ZHENLEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses an organic matter surface treatment cavity structure which comprises a main body cavity, a process reaction upper cavity part, a process reaction lower cavity part and a gas pipeline part, the process reaction upper chamber part comprises an upper baffle plate, a side baffle plate and a heating plate; the upper baffle plate is fixed in the main body cavity, the side baffle plates are arranged on the two sides of the lower surface of the upper baffle plate, and the heating plate is arranged on the upper baffle plate; the process reaction lower cavity part comprises a lower baffle plate, a bearing table, a cold disc, a radio frequency bias device and a circular ring; the cold disc and the radio frequency bias device are sequentially arranged on the bearing table from top to bottom, the lower shielding plates are arranged on the two sides of the bearing table, and the circular ring is arranged between the cold disc and the lower shielding plates. Through the structure of heating the b