Circuit manufacturing device of electrostatic chuck
The utility model discloses a circuit manufacturing device of an electrostatic chuck, which is used for manufacturing a circuit on the electrostatic chuck, the electrostatic chuck is provided with a bearing surface for attaching the circuit, and the bearing surface is a curved surface; the circuit m...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses a circuit manufacturing device of an electrostatic chuck, which is used for manufacturing a circuit on the electrostatic chuck, the electrostatic chuck is provided with a bearing surface for attaching the circuit, and the bearing surface is a curved surface; the circuit manufacturing device comprises a rack and a driving mechanism, the rack is provided with a flexible device, the flexible device is provided with a profiling curved surface matched with the bearing surface in shape, and the profiling curved surface is provided with a groove used for containing a liquid conductive substance; wherein the driving mechanism is configured to be capable of driving at least one of the electrostatic chuck and the flexible device to move to a pressing state, and the pressing state can be kept for a set time; in the abutting state, the flexible device generates elastic deformation, and the profiling curved surface of the flexible device abuts against the bearing surface. According to the circu |
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