TVS device

The utility model discloses and provides a TVS (Transient Voltage Suppressor) device, which comprises a substrate, a trench isolation structure is formed on the substrate, an active region is enclosed by the trench isolation structure, and the active region has a first conductive type; the first annular doped region is located in the active region; the second annular doped region is located in the annular shape of the first annular doped region, and the first annular doped region and the second annular doped region both have a first conduction type; the first diode is formed between the first annular doped region and the second annular doped region; the second diode is formed in the ring of the second annular doped region, and the second diode and the first diode form a series structure. The TVS capacitance can be reduced, the area of a TVS device can be reduced, and the TVS device can be easily integrated with other integrated circuit chips. 本实用新型公开提供了一种TVS器件，包括衬底，所述衬底上形成有沟槽隔离结构，所述沟槽隔离结构围成一有源区，所述有源区具有第一导电类型；