Vacuum coating machine

The utility model discloses a vacuum coating machine and relates to the technical field of vacuum coating. The vacuum coating machine comprises a vacuum coating chamber, a guide rail and a target material moving trolley, a target material unit is installed on the target material moving trolley, and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CAO YONGJUN, YU LONG, PEI BEI, LV QIMENG, WATANABE MASARU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a vacuum coating machine and relates to the technical field of vacuum coating. The vacuum coating machine comprises a vacuum coating chamber, a guide rail and a target material moving trolley, a target material unit is installed on the target material moving trolley, and the target material moving trolley is arranged on the guide rail in a sliding mode so that the target material unit can enter and exit from the vacuum coating chamber. The target material unit is conveyed into the vacuum coating chamber through the target material moving trolley, and sputtering target materials are provided for vacuum coating. And when the target material unit is maintained, the target material moving trolley moves the target material unit out of the vacuum coating chamber. A mounting mechanism is further arranged on the target material moving trolley, the mounting mechanism is rotationally connected with the target material moving trolley, the target material unit is mounted on the mounting mechan