Vacuum coating device
The utility model discloses a vacuum coating device and relates to the technical field of vacuum coating. The vacuum coating device comprises a wafer loading chamber, a preheating chamber, a process chamber and a carrying chamber, the wafer loading chamber, the preheating chamber and the process cha...
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| creator | CAO YONGJUN YU LONG PEI BEI LV QIMENG WATANABE MASARU |
| description | The utility model discloses a vacuum coating device and relates to the technical field of vacuum coating. The vacuum coating device comprises a wafer loading chamber, a preheating chamber, a process chamber and a carrying chamber, the wafer loading chamber, the preheating chamber and the process chamber are respectively arranged at different positions in the circumferential direction of the carrying chamber, the wafer loading chamber can store a plurality of workpieces to be treated, a manipulator is arranged in the carrying chamber, the manipulator can carry the workpieces to be treated to the preheating chamber, and the preheating chamber is arranged in the carrying chamber. The to-be-treated workpiece after being heated can be conveyed to the process chamber; a heating workpiece frame is arranged in the preheating chamber, a plurality of to-be-treated workpieces can be placed on the heating workpiece frame, and the to-be-treated workpieces can be placed on the heating workpiece frame to be heated. Accordin |
| format | Patent |
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The vacuum coating device comprises a wafer loading chamber, a preheating chamber, a process chamber and a carrying chamber, the wafer loading chamber, the preheating chamber and the process chamber are respectively arranged at different positions in the circumferential direction of the carrying chamber, the wafer loading chamber can store a plurality of workpieces to be treated, a manipulator is arranged in the carrying chamber, the manipulator can carry the workpieces to be treated to the preheating chamber, and the preheating chamber is arranged in the carrying chamber. The to-be-treated workpiece after being heated can be conveyed to the process chamber; a heating workpiece frame is arranged in the preheating chamber, a plurality of to-be-treated workpieces can be placed on the heating workpiece frame, and the to-be-treated workpieces can be placed on the heating workpiece frame to be heated. Accordin</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230808&DB=EPODOC&CC=CN&NR=219490131U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230808&DB=EPODOC&CC=CN&NR=219490131U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CAO YONGJUN</creatorcontrib><creatorcontrib>YU LONG</creatorcontrib><creatorcontrib>PEI BEI</creatorcontrib><creatorcontrib>LV QIMENG</creatorcontrib><creatorcontrib>WATANABE MASARU</creatorcontrib><title>Vacuum coating device</title><description>The utility model discloses a vacuum coating device and relates to the technical field of vacuum coating. The vacuum coating device comprises a wafer loading chamber, a preheating chamber, a process chamber and a carrying chamber, the wafer loading chamber, the preheating chamber and the process chamber are respectively arranged at different positions in the circumferential direction of the carrying chamber, the wafer loading chamber can store a plurality of workpieces to be treated, a manipulator is arranged in the carrying chamber, the manipulator can carry the workpieces to be treated to the preheating chamber, and the preheating chamber is arranged in the carrying chamber. The to-be-treated workpiece after being heated can be conveyed to the process chamber; a heating workpiece frame is arranged in the preheating chamber, a plurality of to-be-treated workpieces can be placed on the heating workpiece frame, and the to-be-treated workpieces can be placed on the heating workpiece frame to be heated. 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The vacuum coating device comprises a wafer loading chamber, a preheating chamber, a process chamber and a carrying chamber, the wafer loading chamber, the preheating chamber and the process chamber are respectively arranged at different positions in the circumferential direction of the carrying chamber, the wafer loading chamber can store a plurality of workpieces to be treated, a manipulator is arranged in the carrying chamber, the manipulator can carry the workpieces to be treated to the preheating chamber, and the preheating chamber is arranged in the carrying chamber. The to-be-treated workpiece after being heated can be conveyed to the process chamber; a heating workpiece frame is arranged in the preheating chamber, a plurality of to-be-treated workpieces can be placed on the heating workpiece frame, and the to-be-treated workpieces can be placed on the heating workpiece frame to be heated. Accordin</abstract><oa>free_for_read</oa></addata></record> |
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| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN219490131UU |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Vacuum coating device |
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