Vacuum coating device

The utility model discloses a vacuum coating device and relates to the technical field of vacuum coating. The vacuum coating device comprises a wafer loading chamber, a preheating chamber, a process chamber and a carrying chamber, the wafer loading chamber, the preheating chamber and the process chamber are respectively arranged at different positions in the circumferential direction of the carrying chamber, the wafer loading chamber can store a plurality of workpieces to be treated, a manipulator is arranged in the carrying chamber, the manipulator can carry the workpieces to be treated to the preheating chamber, and the preheating chamber is arranged in the carrying chamber. The to-be-treated workpiece after being heated can be conveyed to the process chamber; a heating workpiece frame is arranged in the preheating chamber, a plurality of to-be-treated workpieces can be placed on the heating workpiece frame, and the to-be-treated workpieces can be placed on the heating workpiece frame to be heated. Accordin