Wafer moisturizing vertical immersion multi-station lifting water tank

The utility model relates to a wafer moisturizing vertical immersion multi-station lifting water tank, which comprises an overflow water tank, a water inlet is formed in the bottom of the overflow water tank; a plurality of lifting single bodies are arranged on one side in the overflow water tank; a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GE CHENGZHONG, WANG HONGSHENG, CHEN BAIBAI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to a wafer moisturizing vertical immersion multi-station lifting water tank, which comprises an overflow water tank, a water inlet is formed in the bottom of the overflow water tank; a plurality of lifting single bodies are arranged on one side in the overflow water tank; a positioning groove connected with the lifting single body is further formed in the overflow water tank. A lifting mechanism is arranged on the outer side of the overflow water tank; and the other side, opposite to the positioning groove, of the lifting single body is connected with the lifting mechanism. According to the invention, the plurality of lifting monomers are arranged in the overflow water tank and are matched with the lifting mechanism and the positioning grooves in the lifting monomers, so that a plurality of wafers can be conveniently placed in the positioning grooves, and under the action of the lifting mechanism, the wafers are completely immersed in the overflow water tank for moisturizing; compare