Gas diffuser for loading chamber and loading chamber
The utility model provides a gas diffuser for a loading cavity and the loading cavity. The gas diffuser for the loading cavity comprises a cap body and a cap edge arranged along the tail end of the cap body, a plurality of rows of diffusion holes are formed in the side wall of the cap body so that g...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a gas diffuser for a loading cavity and the loading cavity. The gas diffuser for the loading cavity comprises a cap body and a cap edge arranged along the tail end of the cap body, a plurality of rows of diffusion holes are formed in the side wall of the cap body so that gas entering from a cap opening of the cap body can be exhausted into the loading cavity, and the cap edge is installed in the loading cavity through a plurality of fixing pieces. According to the utility model, the time required for vacuum breaking of the loading cavity can be effectively reduced, and the cost is effectively reduced.
本实用新型提供加载腔用气体扩散器以及加载腔。所述加载腔用气体扩散器包括帽体以及沿所述帽体末端设置的帽沿,所述帽体的侧壁上开设有多排扩散孔,以将从其帽口进入的气体排入加载腔中,所述帽沿通过多个固定件安装在所述加载腔中。本实用新型能有效减小加载腔破空所需时间并有效降低成本。 |
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