Silicon carbide tray and cleaning device

The silicon carbide tray is of an integrally-formed structure and comprises a bottom plate, a first lug plate and a second lug plate, the first lug plate is perpendicularly installed at one end of the bottom plate, the second lug plate is perpendicularly installed at the other end of the bottom plat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHI MING, SUN XIKAI, DONG JIANBIN, SUN CHENGUANG, WANG YANJUN, YAN ZHENGXIAN, HIGASHI SHIHIRO, TAN YONGLIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The silicon carbide tray is of an integrally-formed structure and comprises a bottom plate, a first lug plate and a second lug plate, the first lug plate is perpendicularly installed at one end of the bottom plate, the second lug plate is perpendicularly installed at the other end of the bottom plate to form a U-shaped structure, the two sides of the bottom plate are provided with a first side wall a and a first side wall b respectively, and the first side wall a and the first side wall b are arranged on the bottom plate. A second side wall a and a second side wall b are arranged on the two sides of the first lug plate respectively, a third side wall a and a third side wall b are arranged on the two sides of the second lug plate respectively, the second side wall a, the first side wall a and the third side wall a are sequentially connected end to end to form a first side fence, and the second side wall b, the first side wall b and the third side wall b are sequentially connected end to end to form a second si