In-situ nanoindentation testing device in scanning electron microscope

In-situ nanoindentation testing device in scanning electron microscope

The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit,...

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Hauptverfasser: HUANG HU, SU WENJIE, WU HAOXIANG, LI XUAN, WEI DAYU, LIU RENLIN
Format: Patent
Sprache:chi ; eng
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INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator HUANG HU
SU WENJIE
WU HAOXIANG
LI XUAN
WEI DAYU
LIU RENLIN
description The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit, an X-axis and Y-axis piezoelectric precise positioning platform, a Z-axis piezoelectric precise positioning platform and a base. The precise press-in driving-displacement integrated unit is installed on the Z-axis piezoelectric precise positioning platform, the precise press-in force detection unit is installed on the XY-axis piezoelectric precise positioning platform, and the Z-axis piezoelectric precise positioning platform and the XY-axis piezoelectric precise positioning platform are both installed on the base. The device has the advantages of novel structure, miniaturization, high precision, good compatibility and large positioning range, and can be matched with the scanning electron microscope for in-situ ob
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN219455819UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN219455819UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN219455819UU3</originalsourceid><addsrcrecordid>eNqNyjEKwkAQRuFtLES9w2KfImrA1MGgjZWpwzD5lYFkdsmMnl8FD2D14PEtQ3vRwsSfUUmT6AB1ckkaHeaijzjgJYwoGo1J9bswgn3-mEl4TsYpYx0WdxoNm19XYduebs25QE49LBND4X1z3ZX1oaqOZd11-7_QG-JLNRE</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>In-situ nanoindentation testing device in scanning electron microscope</title><source>esp@cenet</source><creator>HUANG HU ; SU WENJIE ; WU HAOXIANG ; LI XUAN ; WEI DAYU ; LIU RENLIN</creator><creatorcontrib>HUANG HU ; SU WENJIE ; WU HAOXIANG ; LI XUAN ; WEI DAYU ; LIU RENLIN</creatorcontrib><description>The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit, an X-axis and Y-axis piezoelectric precise positioning platform, a Z-axis piezoelectric precise positioning platform and a base. The precise press-in driving-displacement integrated unit is installed on the Z-axis piezoelectric precise positioning platform, the precise press-in force detection unit is installed on the XY-axis piezoelectric precise positioning platform, and the Z-axis piezoelectric precise positioning platform and the XY-axis piezoelectric precise positioning platform are both installed on the base. The device has the advantages of novel structure, miniaturization, high precision, good compatibility and large positioning range, and can be matched with the scanning electron microscope for in-situ ob</description><language>chi ; eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20230801&amp;DB=EPODOC&amp;CC=CN&amp;NR=219455819U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20230801&amp;DB=EPODOC&amp;CC=CN&amp;NR=219455819U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HUANG HU</creatorcontrib><creatorcontrib>SU WENJIE</creatorcontrib><creatorcontrib>WU HAOXIANG</creatorcontrib><creatorcontrib>LI XUAN</creatorcontrib><creatorcontrib>WEI DAYU</creatorcontrib><creatorcontrib>LIU RENLIN</creatorcontrib><title>In-situ nanoindentation testing device in scanning electron microscope</title><description>The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit, an X-axis and Y-axis piezoelectric precise positioning platform, a Z-axis piezoelectric precise positioning platform and a base. The precise press-in driving-displacement integrated unit is installed on the Z-axis piezoelectric precise positioning platform, the precise press-in force detection unit is installed on the XY-axis piezoelectric precise positioning platform, and the Z-axis piezoelectric precise positioning platform and the XY-axis piezoelectric precise positioning platform are both installed on the base. The device has the advantages of novel structure, miniaturization, high precision, good compatibility and large positioning range, and can be matched with the scanning electron microscope for in-situ ob</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjEKwkAQRuFtLES9w2KfImrA1MGgjZWpwzD5lYFkdsmMnl8FD2D14PEtQ3vRwsSfUUmT6AB1ckkaHeaijzjgJYwoGo1J9bswgn3-mEl4TsYpYx0WdxoNm19XYduebs25QE49LBND4X1z3ZX1oaqOZd11-7_QG-JLNRE</recordid><startdate>20230801</startdate><enddate>20230801</enddate><creator>HUANG HU</creator><creator>SU WENJIE</creator><creator>WU HAOXIANG</creator><creator>LI XUAN</creator><creator>WEI DAYU</creator><creator>LIU RENLIN</creator><scope>EVB</scope></search><sort><creationdate>20230801</creationdate><title>In-situ nanoindentation testing device in scanning electron microscope</title><author>HUANG HU ; SU WENJIE ; WU HAOXIANG ; LI XUAN ; WEI DAYU ; LIU RENLIN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN219455819UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HUANG HU</creatorcontrib><creatorcontrib>SU WENJIE</creatorcontrib><creatorcontrib>WU HAOXIANG</creatorcontrib><creatorcontrib>LI XUAN</creatorcontrib><creatorcontrib>WEI DAYU</creatorcontrib><creatorcontrib>LIU RENLIN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HUANG HU</au><au>SU WENJIE</au><au>WU HAOXIANG</au><au>LI XUAN</au><au>WEI DAYU</au><au>LIU RENLIN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>In-situ nanoindentation testing device in scanning electron microscope</title><date>2023-08-01</date><risdate>2023</risdate><abstract>The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit, an X-axis and Y-axis piezoelectric precise positioning platform, a Z-axis piezoelectric precise positioning platform and a base. The precise press-in driving-displacement integrated unit is installed on the Z-axis piezoelectric precise positioning platform, the precise press-in force detection unit is installed on the XY-axis piezoelectric precise positioning platform, and the Z-axis piezoelectric precise positioning platform and the XY-axis piezoelectric precise positioning platform are both installed on the base. The device has the advantages of novel structure, miniaturization, high precision, good compatibility and large positioning range, and can be matched with the scanning electron microscope for in-situ ob</abstract><oa>free_for_read</oa></addata></record>
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subjects INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title In-situ nanoindentation testing device in scanning electron microscope
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T11%3A39%3A20IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=HUANG%20HU&rft.date=2023-08-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN219455819UU%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true