In-situ nanoindentation testing device in scanning electron microscope
The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit,...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The utility model relates to an in-situ nanoindentation testing device in a scanning electron microscope, and belongs to the field of mechatronics precise instruments. The testing device is composed of a precise press-in driving-displacement integration unit, a precise press-in force detection unit, an X-axis and Y-axis piezoelectric precise positioning platform, a Z-axis piezoelectric precise positioning platform and a base. The precise press-in driving-displacement integrated unit is installed on the Z-axis piezoelectric precise positioning platform, the precise press-in force detection unit is installed on the XY-axis piezoelectric precise positioning platform, and the Z-axis piezoelectric precise positioning platform and the XY-axis piezoelectric precise positioning platform are both installed on the base. The device has the advantages of novel structure, miniaturization, high precision, good compatibility and large positioning range, and can be matched with the scanning electron microscope for in-situ ob |
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