Gas protection device for temperature measuring port of main furnace chamber of crystal growth machine

The utility model discloses a gas protection device for a temperature measuring port of a main furnace chamber of a crystal growth machine. The gas protection device comprises a gas storage ring and an argon pipeline communicated with the gas storage ring, and two ends of the gas storage ring are re...

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Bibliographische Detailangaben
Hauptverfasser: ZHONG YOUSHENG, WAN JUNZHAO, WANG JUNREN, WU HONGMING, CHEN ZHIGANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a gas protection device for a temperature measuring port of a main furnace chamber of a crystal growth machine. The gas protection device comprises a gas storage ring and an argon pipeline communicated with the gas storage ring, and two ends of the gas storage ring are respectively connected with the quartz lens and the main furnace chamber of the crystal growth machine in a sealing manner. According to the gas protection device provided by the utility model, the cleanliness of the quartz lens of the thermal field thermodetector can be protected, the atomization interference of a thermal field test is improved, the accuracy of the output temperature is ensured, and the wire breakage phenomenon of a crystal bar caused by a large temperature gradient is well improved; therefore, the gas protection device disclosed by the invention has relatively good practical value and technical improvement significance. 本实用新型公开了一种用于长晶机主炉室测温口的气体保护装置,包括储气环、与所述储气环连通的氩气管道;所述储气环的两端分别与石英镜片和长晶机主炉室密封连接。本申请