Silicon nitride ceramic substrate carrier
The utility model provides a silicon nitride ceramic substrate carrier. The silicon nitride ceramic substrate carrier comprises a carrier body. According to the silicon nitride ceramic substrate carrier, through the arrangement of the fixing mechanism, firstly, a bolt is rotated clockwise, so that a...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a silicon nitride ceramic substrate carrier. The silicon nitride ceramic substrate carrier comprises a carrier body. According to the silicon nitride ceramic substrate carrier, through the arrangement of the fixing mechanism, firstly, a bolt is rotated clockwise, so that a right clamping plate and a left clamping plate are separated by a certain distance, at the moment, a spring is in a compressed state, then a silicon nitride ceramic substrate is inserted through gaps in the two sides of a nut seat, then the bolt is slowly rotated anticlockwise, and the bolt moves outwards, so that the silicon nitride ceramic substrate is fixed. When the silicon nitride ceramic substrate is transported, the fixing block loses extrusion force from the bolt, the spring recovers deformation, the left clamping plate drives the left non-slip mat to move towards the inner side, the right clamping plate drives the right non-slip mat to move towards the inner side, and therefore the silicon nitride ceramic |
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