Line width measuring device for excimer laser

The utility model discloses an excimer laser line width measuring device. The device comprises a light beam homogenizing and shaping module and a spectral measurement module which are sequentially arranged along a laser transmission path, the light beam homogenizing and shaping module is used for receiving the multi-mode laser beams emitted by the light source module, homogenizing and shaping the multi-mode laser beams and outputting the multi-mode laser beams, and the spectral measurement module is used for receiving the light beams output by the light beam homogenizing and shaping module and measuring the light beams. The light beam homogenizing and shaping module homogenizes the multi-mode laser beam, so that the uniformity of the multi-mode laser beam is remarkably improved, any beam of light received by the spectral measurement module contains light of most modes, and the accuracy of spectral bandwidth data of excimer laser line width measurement is improved. 本申请公开了一种准分子激光器线宽测量装置，包括沿激光传输路径依次设置的光束匀化整形模块和光