Single crystal furnace cover capable of prolonging water cooling time

The utility model relates to the field of single crystal furnaces, and particularly discloses a single crystal furnace cover capable of prolonging water cooling time, a main cold water channel is arranged between an outer furnace cover and an inner furnace cover, a main water inlet is arranged on th...

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1. Verfasser: NI JIANGANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model relates to the field of single crystal furnaces, and particularly discloses a single crystal furnace cover capable of prolonging water cooling time, a main cold water channel is arranged between an outer furnace cover and an inner furnace cover, a main water inlet is arranged on the main cold water channel close to a middle cylinder, and a main water outlet is arranged on the main cold water channel on the periphery of a furnace cover body. The main cold water channel is in a spiral shape with the width gradually increasing and then gradually decreasing in the water flow direction. The middle cylinder comprises a first outer cylinder and a first inner cylinder, and a spiral first water cooling channel is formed between the first outer cylinder and the first inner cylinder in the vertical direction; a first water inlet and a first water outlet communicated with the main cold water channel are formed in the side surface of the first cold water channel; the observation cylinder comprises a seco