Ion implantation equipment for large-area target sheet

The utility model provides ion implantation equipment for a large-area target sheet. The ion implantation equipment comprises a beam generating device, an ion implantation mechanism, a vacuum lock and an equipment front-end transmission module which are connected in sequence, the beam generation device comprises an ion source cavity, a front expansion cavity, a rear expansion cavity, a middle section cavity and a collimation cavity which are sequentially connected in the ion beam transmission direction. An ion source, an extraction electrode and an analysis magnetic field assembly are sequentially arranged in the ion source cavity in the ion beam transmission direction. An expansion magnet assembly is arranged in the front expansion cavity; a collimation magnet assembly is arranged in the collimation cavity; the heights of the ion source cavity, the front expansion cavity, the rear expansion cavity, the middle section cavity and the collimation cavity are in an increasing trend, and the widths of the ion sour