Double-sided integrated photoetching device

The utility model provides a double-sided integrated photoetching device which comprises a photoetching equipment assembly and a material changing mechanism, the photoetching equipment assembly comprises a processing table, a photoetching host and a double-sided integrated photoetching table; the ma...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU YIBIAO, FU RENXUAN, SONG XIANWEN, XU YONGJUN, CHEN QIMING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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