DROPLET DISCHARGE DEVICE
There is provided a droplet discharge apparatus including: a main discharge portion; and an inspection discharge portion disposed on one side of the main discharge portion, in which the main discharge portion includes: a main frame; the main workbench is arranged on the main frame and is used for ar...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | There is provided a droplet discharge apparatus including: a main discharge portion; and an inspection discharge portion disposed on one side of the main discharge portion, in which the main discharge portion includes: a main frame; the main workbench is arranged on the main frame and is used for arranging a mother substrate; a dispenser mover disposed on the main table and configured to move in a first direction; and a dispenser configured to move in a first direction by means of a dispenser mover and discharge liquid droplets, in which the inspection discharge portion includes: an inspection frame; an inspection table arranged on the inspection frame and used for arranging a sample substrate and an inspection substrate; and a sensor capable of obtaining measurement information of the liquid droplets for inspection discharged onto the substrate for inspection by the dispenser and the sample arranged on the substrate for sample, the dispenser being configured to discharge the liquid droplets onto the substrat |
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