MEMS IMU array device

The utility model discloses an MEMS (micro-electromechanical system) IMU (inertial measurement unit) array device. According to the utility model, the plurality of MEMS IMUs are utilized to form an array, so that redundant configuration is realized, the reliability during working is improved, firstly, when part of the MEMS IMUs fail, the rest of the MEMS IMUs can still continuously output measurement results, and secondly, when the MEMS IMUs fail, the rest of the MEMS IMUs can still continuously output measurement results; and 2, when a part of the MEMS IMUs have relatively large measurement noise, the rest of the MEMS IMUs can eliminate abnormal noise through a comparison and discrimination method, so that the measurement precision is improved. 本实用新型公开了一种MEMS IMU阵列设备。本实用新型利用多个MEMS IMU构成阵列，实现了冗余配置，提高了工作时的可靠性，一是在其中部分MEMS IMU故障时，剩余的MEMS IMU仍然可以持续输出测量结果；二是在其中部分MEMS IMU出现较大的测量噪声时，剩余的MMES IMU可以通过比较甄别的办法排除异常噪声，从而提高测量的精度。