Wafer cassette clamping device and wafer cassette carrying composite robot

The wafer box clamping device comprises a clamp body, the clamp body comprises a supporting plate, and the supporting plate is provided with a receding groove which is provided with an opening at the front end and is used for receding a connecting block of a wafer box; the two sides and the rear sid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DENG RONGXIN, CHEN YELEI, YIN SONGHUA, XU GUANHUA
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The wafer box clamping device comprises a clamp body, the clamp body comprises a supporting plate, and the supporting plate is provided with a receding groove which is provided with an opening at the front end and is used for receding a connecting block of a wafer box; the two sides and the rear side of the receding groove are each provided with a guide block, and the inner side face, facing the receding groove, of each guide block comprises a guide face located on the upper portion and a positioning face located on the lower portion. An upper accommodating area for accommodating a clamping plate of a wafer box is formed between the guide surfaces of the guide blocks, and a lower positioning area for positioning the clamping plate of the wafer box is formed between the positioning surfaces of the guide blocks; the guide face is used for guiding the clamping plate to enter the lower positioning area from the upper containing area, and a positioning column matched with a positioning groove formed in the clampin