Cleaning jig and cleaning machine

According to the cleaning jig and the cleaning machine, the cleaning jig comprises a supporting rod assembly, the supporting rod assembly comprises at least two first supporting rods and at least one second supporting rod, the two sides over the at least one second supporting rod are each provided w...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: XUE HAIJIAN, GONG YUFENG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:According to the cleaning jig and the cleaning machine, the cleaning jig comprises a supporting rod assembly, the supporting rod assembly comprises at least two first supporting rods and at least one second supporting rod, the two sides over the at least one second supporting rod are each provided with at least one first supporting rod, and the first supporting rods are arranged on the two sides over the at least one second supporting rod; the first supporting rod is parallel to the second supporting rod, and a plurality of clamping grooves are formed in the first supporting rod and the second supporting rod; the two fixing plates are arranged at the two ends of the supporting rod assembly respectively. According to the technical scheme provided by the utility model, the cleaning efficiency of the semiconductor accessories can be improved, so that the usage amount of acid cleaning liquid is reduced, and meanwhile, the damage rate of the cleaned semiconductor accessories in the cleaning process is also reduced