Electrostatic chuck base
The utility model relates to an electrostatic chuck base. An electrostatic chuck for supporting a workpiece during a step of processing the workpiece and an electrostatic chuck base assembly prepared by additive manufacturing techniques are described. 本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技...
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| creator | WALDFRIED CARLO LESCHINSKI JULIA POPA FABRIZIO YARDIZLI MOJTABA |
| description | The utility model relates to an electrostatic chuck base. An electrostatic chuck for supporting a workpiece during a step of processing the workpiece and an electrostatic chuck base assembly prepared by additive manufacturing techniques are described.
本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技术制备的静电吸盘底座组件。 |
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本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技术制备的静电吸盘底座组件。</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230530&DB=EPODOC&CC=CN&NR=219106112U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230530&DB=EPODOC&CC=CN&NR=219106112U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WALDFRIED CARLO</creatorcontrib><creatorcontrib>LESCHINSKI JULIA</creatorcontrib><creatorcontrib>POPA FABRIZIO</creatorcontrib><creatorcontrib>YARDIZLI MOJTABA</creatorcontrib><title>Electrostatic chuck base</title><description>The utility model relates to an electrostatic chuck base. An electrostatic chuck for supporting a workpiece during a step of processing the workpiece and an electrostatic chuck base assembly prepared by additive manufacturing techniques are described.
本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技术制备的静电吸盘底座组件。</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJBwzUlNLinKLy5JLMlMVkjOKE3OVkhKLE7lYWBNS8wpTuWF0twMSm6uIc4euqkF-fGpxQWJyal5qSXxzn5GhpaGBmaGhkahocZEKQIAPxgjAA</recordid><startdate>20230530</startdate><enddate>20230530</enddate><creator>WALDFRIED CARLO</creator><creator>LESCHINSKI JULIA</creator><creator>POPA FABRIZIO</creator><creator>YARDIZLI MOJTABA</creator><scope>EVB</scope></search><sort><creationdate>20230530</creationdate><title>Electrostatic chuck base</title><author>WALDFRIED CARLO ; LESCHINSKI JULIA ; POPA FABRIZIO ; YARDIZLI MOJTABA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN219106112UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2023</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>WALDFRIED CARLO</creatorcontrib><creatorcontrib>LESCHINSKI JULIA</creatorcontrib><creatorcontrib>POPA FABRIZIO</creatorcontrib><creatorcontrib>YARDIZLI MOJTABA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WALDFRIED CARLO</au><au>LESCHINSKI JULIA</au><au>POPA FABRIZIO</au><au>YARDIZLI MOJTABA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Electrostatic chuck base</title><date>2023-05-30</date><risdate>2023</risdate><abstract>The utility model relates to an electrostatic chuck base. An electrostatic chuck for supporting a workpiece during a step of processing the workpiece and an electrostatic chuck base assembly prepared by additive manufacturing techniques are described.
本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技术制备的静电吸盘底座组件。</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | Electrostatic chuck base |
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