Electrostatic chuck base

The utility model relates to an electrostatic chuck base. An electrostatic chuck for supporting a workpiece during a step of processing the workpiece and an electrostatic chuck base assembly prepared by additive manufacturing techniques are described. 本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技...

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Bibliographische Detailangaben
Hauptverfasser:	WALDFRIED CARLO, LESCHINSKI JULIA, POPA FABRIZIO, YARDIZLI MOJTABA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	The utility model relates to an electrostatic chuck base. An electrostatic chuck for supporting a workpiece during a step of processing the workpiece and an electrostatic chuck base assembly prepared by additive manufacturing techniques are described. 本申请案涉及一种静电吸盘底座。描述用于在处理工件的步骤期间支撑所述工件的静电吸盘及通过增材制造技术制备的静电吸盘底座组件。