Proportional valve flow automatic calibration equipment
The utility model discloses automatic flow calibration equipment for a proportional valve, and relates to the technical field of fluid control, a pressure control unit comprises a first pipeline, and a vacuum unit comprises a second pipeline and a third pipeline; two ends of the first pipeline are r...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses automatic flow calibration equipment for a proportional valve, and relates to the technical field of fluid control, a pressure control unit comprises a first pipeline, and a vacuum unit comprises a second pipeline and a third pipeline; two ends of the first pipeline are respectively connected with a gas source and a proportional valve; the first pipeline is provided with a first pressure reducer, a first manual valve, a first filter, a first pressure gauge, a second pressure reducer, a second pressure gauge, a gas capacitor, a second manual valve, a mass flow meter, a third pressure reducer, a first electric valve and a second filter; one end of the second pipeline is connected with the vacuum container, the other end of the second pipeline is connected between the air capacitor and the second manual valve, and a second electric valve is arranged on the second pipeline; one end of the third pipeline is connected with the vacuum container, the other end is connected with the proport |
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