Integrated circuit constant temperature unit and integrated circuit process system

The utility model provides a constant temperature unit of an integrated circuit. The integrated circuit constant temperature unit is configured to maintain the temperature of the liquid in the liquid supply tube. The utility model further provides an integrated circuit process system. The integrated circuit process system comprises a heating unit, a control unit, a spraying unit and the integrated circuit constant temperature unit. The heating unit is configured to heat a developer solution. The control unit receives the developing solution from the heating unit through a first solution supply pipe. The control unit is configured to control a flow rate of the developer. And the spraying unit receives the developing solution from the control unit through a second solution supply pipe. The spraying unit is configured to spray the developing solution onto a wafer. 本申请提出一种集成电路恒温单元。所述集成电路恒温单元经配置以维持供液管中的液体的温度。本申请还提出一种集成电路工艺系统。所述集成电路工艺系统包括加热单元、控制单元、喷淋单元以及上述的集成电路恒温单元。所述加热单元经配置以加热显影液。所述控制单元通过第一供液管从所述加热单元接收所述显影液。所述控制单元