Heat treatment device and preparation equipment of solar cell

The utility model discloses a heat treatment device and preparation equipment of a solar cell, and belongs to the field of solar cells. A heat treatment device is used for preparation equipment of solar cells and comprises a feeding chamber, a process chamber and a discharging chamber which are arra...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: DONG GANGQIANG, JIANG HAO, IKUSAO, WANG QI, RAN XIAOCHAO, ZHAO YU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model discloses a heat treatment device and preparation equipment of a solar cell, and belongs to the field of solar cells. A heat treatment device is used for preparation equipment of solar cells and comprises a feeding chamber, a process chamber and a discharging chamber which are arranged in the material flowing direction. The discharging end of the feeding chamber is connected with the feeding end of the process chamber through a first gate valve, and the discharging end of the process chamber is connected with the feeding end of the discharging chamber through a second gate valve; the feeding chamber, the process chamber and the discharging chamber are respectively connected with a vacuumizing device through pipelines, and regulating valves are arranged on the pipelines; and the process chamber is communicated with a protective gas source through a gas conveying pipeline and is used for injecting protective gas into the feeding chamber. According to the invention, the problem that the battery