MEMS resonant accelerometer based on high-order synchronization

The utility model discloses an MEMS resonant accelerometer based on high-order synchronization, and belongs to the technical field of MEMS. Comprising a low-frequency sensing module which is used for converting external acceleration information into a vibration signal of a low-frequency resonant beam; the synchronization module comprises a low-frequency synchronization circuit and a high-frequency detection circuit, and the low-frequency synchronization circuit is used for converting a vibration signal of a low-frequency resonance beam in the low-frequency sensing module into an excitation signal and applying the excitation signal to a high-frequency resonance disc in the high-frequency coupling module, so that the vibration frequencies of the high-frequency resonance disc and the low-frequency resonance beam are coupled and synchronized; the high-frequency detection circuit is used for detecting a vibration signal of the high-frequency resonance disc and calculating the external acceleration according to the