Filter assembly and wafer processing device

The utility model discloses a filter assembly and a wafer processing device, and solves the technical problems that a filter assembly in a vacuum pump filter in the prior art is inconvenient to replace, and the service life is affected. The filter assembly comprises a first barrel, a second barrel and a filter part, wherein the first barrel is provided with a first barrel cavity, a first outlet used for being in butt joint with a vacuum device and a first inlet used for being in butt joint with grinding equipment which are communicated; the second barrel is arranged in the first barrel cavity, and the second barrel is provided with a second barrel cavity, a second outlet used for being in butt joint with the first outlet and a second inlet used for being in butt joint with the first barrel cavity which are communicated; and the filtering piece is arranged in the first barrel cavity. In the process that the grinding equipment is vacuumized by using the vacuum device, gas enters the first barrel cavity through