AlN ceramic-based four-cantilever bridging micro hot plate gas sensor array

The utility model discloses an AlN ceramic-based four-cantilever bridged micro hot plate gas sensor array, and aims to solve the problems of poor mechanical property, thermal interference and insufficient thermal stability of the existing micro hot plate sensor. According to a substrate in the AlN ceramic-based four-cantilever bridging micro-hot plate gas sensor array, four cantilevers are arranged in a rectangular frame, the four cantilevers form a cross-shaped structure, an interdigital signal electrode is arranged on the front surface of each cantilever, a heater electrode is arranged on the back surface of each cantilever, and the heater electrodes and the signal electrodes are symmetrically arranged on the front and back surfaces. Sensitive films are arranged between the signal electrodes to form a sensor array unit, the heater electrode is of a snakelike structure, and the substrate is an AlN ceramic substrate. According to the utility model, the heater electrode and the signal electrode are in platinum