Measuring device for semiconductor crystal bar NOTCH groove

The utility model discloses a measuring device for a semiconductor crystal bar NOTCH groove. The device comprises a dial indicator, an indicator hand and a housing, and the housing is provided with a main body part and an extension part. The pointer is connected to a measuring shaft at the lower end...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHAO ZHENHUI, ZHANG HONGHAO, JIANG GUOXING, WANG XUEFENG, YANG SHOULIANG, ZHU QINFA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a measuring device for a semiconductor crystal bar NOTCH groove. The device comprises a dial indicator, an indicator hand and a housing, and the housing is provided with a main body part and an extension part. The pointer is connected to a measuring shaft at the lower end of the dial indicator, the dial indicator and the pointer are integrally accommodated in the shell, the dial indicator is accommodated in the main body part of the shell, and the pointer is accommodated in the extension part of the shell; when the measuring end of the pointer is flush with the end part of the extension part of the housing, the zero point of the dial indicator is located. By adopting the device provided by the utility model, the NTOCH groove depth of the monocrystalline silicon rod can be more conveniently measured without the participation of a dial indicator base, and after the zero point of the dial indicator is accurately set, the NTOCH groove of the monocrystalline silicon piece can also be me