Fractionation device for recovering industrial waste gas and purifying electronic-grade hexafluoroethane

The utility model provides a fractionating device for recovering industrial waste gas and purifying electronic-grade hexafluoroethane, and relates to a purifying device for electronic-grade hexafluoroethane. According to the scheme, the fractionating device for recovering and purifying the electroni...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YUAN YONGZHI, LU WENYING, MA BENHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a fractionating device for recovering industrial waste gas and purifying electronic-grade hexafluoroethane, and relates to a purifying device for electronic-grade hexafluoroethane. According to the scheme, the fractionating device for recovering and purifying the electronic-grade hexafluoroethane from the industrial waste gas comprises a condensing box, a rectifying box and a tower kettle reboiler which are sequentially communicated, a condenser is mounted on the upper side in the condensing box, and a first pre-cooling assembly is mounted on the lower side in the condensing box; the first pre-cooling assembly comprises a plurality of first condensation rings with the inner diameters decreasing in sequence, a first connecting pipe is connected between every two adjacent first condensation rings, a first refrigerant pipeline is connected between the first condensation ring on the outermost side and the condenser, the first condensation ring on the outermost side is detachably connect