Vertical graphite boat

The utility model discloses a vertical graphite boat which comprises a plurality of boat pieces, at least two vertical rows of bearing grooves for bearing silicon wafers are arranged on the boat pieces, a plurality of through holes are arranged on the boat pieces, the through holes of the plurality...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU YOUCHENG, WU DEYI, CHENG QIUYUN, ZHANG CHUNCHENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a vertical graphite boat which comprises a plurality of boat pieces, at least two vertical rows of bearing grooves for bearing silicon wafers are arranged on the boat pieces, a plurality of through holes are arranged on the boat pieces, the through holes of the plurality of boat pieces are connected in series through a rod-shaped structure, boat blocks are arranged at the upper ends and the lower ends of two adjacent boat pieces, and a plurality of boat blocks form a boat block group. And positioning blocks are arranged at two ends of the boat block group. The utility model has the advantages of higher capacity improvement space, higher strength, small thermal expansion deformation, more reliable silicon wafer lamination and the like. 本实用新型公开了一种立式石墨舟,包括若干舟片,舟片上至少设有两竖排用于承载硅片的承载槽,舟片上开设有多个通孔,若干舟片的通孔通过杆状结构串接,相邻两块舟片的上下两端均设有舟块,多个舟块形成舟块组,舟块组的两端设有定位块。本实用新型具有产能提升空间更高、强度更高、热膨胀变形小,硅片贴合更可靠等优点。