Microchip transfer device capable of measuring electricity

The utility model relates to the technical field of semiconductor devices, and discloses a microchip transfer device capable of measuring electricity, which comprises a contact for transferring a microchip; the probe is used for driving the contact to adjust the pose, and the probe and the contact a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: NIE JINHUI, ZHENG QUANSHUI, YANG DINGLIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model relates to the technical field of semiconductor devices, and discloses a microchip transfer device capable of measuring electricity, which comprises a contact for transferring a microchip; the probe is used for driving the contact to adjust the pose, and the probe and the contact are fixedly connected or integrally formed; and the conductive assembly is used for measuring the electrical characteristics of the microchip, and the detection end of the conductive assembly is arranged on the contact. The microchip transfer device provided by the utility model can synchronously realize transfer and electrical characteristic detection of the microchip, simplify the operation process and improve the working efficiency. 本实用新型涉及半导体器件技术领域,公开一种可测电的微型片转移装置,微型片转移装置包括:用于转移微型片的触头;用于驱动所述触头调整位姿的探针,且所述探针与所述触头固定连接或一体成型;以及用于测量所述微型片电特性的导电组件,所述导电组件的检测端设置于所述触头。本实用新型提供的微型片转移装置能够同步实现微型片的转移和电特性检测,简化作业工序,提高工作效率。