Electroplating device
The utility model discloses an electroplating device. The utility model aims to realize space saving when various kinds of electroplating are carried out. A plating apparatus is provided with: a plating work unit in which at least one pair of plating units including a rotary table unit are disposed...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses an electroplating device. The utility model aims to realize space saving when various kinds of electroplating are carried out. A plating apparatus is provided with: a plating work unit in which at least one pair of plating units including a rotary table unit are disposed adjacent to each other; a transfer crane unit that is disposed so as to be capable of moving a cathode container, and that has a gantry that extends in a first direction on one side of a second direction of the plating work unit, when a direction adjacent to the rotary table unit is the first direction and a direction intersecting the first direction is the second direction; and an input part and/or a recovery part which are/is arranged on at least one of the periphery of the plating operation part in a manner that the cathode container can be placed on the input part and/or the recovery part.
一种电镀装置。本实用新型的课题在于实现进行多种电镀时的空间节省。电镀装置具备:电镀作业部,在该电镀作业部中,包含旋转台部的至少一对电镀单元相邻配置;搬运起重机部,其具有架台,在将所述旋转台部相邻的方向设为第1方向且将与该第1方向交叉的方向设为第2 |
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