Normal-temperature-to-high-temperature gas path plate-penetrating adapter

The utility model relates to a normal-temperature-to-high-temperature gas path plate-penetrating adapter which comprises an adapter body, a heat insulation layer and a plurality of layers of metal plates, the heat insulation layer is located in a semiconductor integrated gas holder and penetrates th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GENG DEZHAN, GAO XIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The utility model relates to a normal-temperature-to-high-temperature gas path plate-penetrating adapter which comprises an adapter body, a heat insulation layer and a plurality of layers of metal plates, the heat insulation layer is located in a semiconductor integrated gas holder and penetrates through the semiconductor integrated gas holder, and connecting threads are arranged at the two ends of the adapter body respectively. The high-temperature-resistant joint is arranged at the first end of the adapter body, is in threaded connection with the first end and is connected with a gas pipe in a high-temperature area in the semiconductor integrated gas cabinet through the high-temperature-resistant joint; and the normal-temperature gas pipe joint is arranged at the second end of the adapter body, is in threaded connection with the second end, and is connected with a gas pipe in a normal-temperature area in the semiconductor integrated gas cabinet through the normal-temperature gas pipe joint. The utility mode