Premixing buffer device for semiconductor electroplating SnAg liquid medicine

The utility model provides a premixing buffer device for semiconductor electroplating SnAg liquid medicine, which comprises a buffer tank, the buffer tank is provided with an initial feeding end, one side of the buffer tank is connected with an infusion pump through a pipeline, and the infusion pump is connected with a circulating feeding end of the buffer tank through a filtering mechanism. The liquid medicine pre-mixing device has the beneficial effects that the liquid medicine is independently pre-mixed, so that the long-time waiting process of directly adding the liquid medicine into electroplating equipment is avoided, the liquid medicine is filtered through the filtering mechanism, the equipment is prevented from being blocked in the later period, and meanwhile, the device is movable and better adapts to different application occasions. 本实用新型提供了一种半导体电镀SnAg药水用预混缓冲装置，包括缓冲槽，所述缓冲槽开设有初始加料端，所述缓冲槽的一侧通过管路连接有抽液泵，所述抽液泵通过过滤机构与缓冲槽的循环进料端连接。本实用新型的有益效果体现在：将药水进行单独的预混，从而避免了直接添加入电镀设备进行长时间的等待过程，且通过过滤机构对药水进行过滤，避免了后期对设备的堵塞，