Excimer laser power supply protection circuit and excimer laser

The utility model discloses an excimer laser power supply protection circuit and an excimer laser. The power supply protection circuit is arranged between a direct-current power supply module and a terminal module of the excimer laser, and comprises a filtering unit and a surge protection unit, wherein the filtering unit comprises a power grid filter and a high-frequency filter, the surge protection unit at least comprises a transient suppression diode, and the transient suppression diode is arranged at the input end of the power grid filter and is connected with the high-frequency filter in parallel; the clamping voltage of the transient suppression diode is set to be the suppression coefficient multiple of the withstand voltage value of the ceramic capacitor so as to be used for absorbing surge generated by fluctuation of the power supply and protecting the terminal module. The excimer laser power supply protection circuit has good surge absorption capability and can realize electrostatic protection. 本实用新型公