Vacuum detection instrument for semiconductor equipment

The utility model discloses a semiconductor equipment vacuum detection instrument, which relates to the technical field of semiconductor equipment vacuum detection and particularly comprises a workbench, a helium mass spectrometer leak detector is arranged on the upper surface of the workbench, a rotary joint is arranged on the upper surface of a fixed block through a first annular frame, and a sealing gasket is arranged at the other end of the rotary joint. A rotating shaft is arranged on the upper surface of the fixing block through a hinge block, a sliding groove is formed in the upper surface of the workbench, a sliding clamping block is slidably connected to the position, located on the inner side wall of the sliding groove, of the upper surface of the workbench, a clamping block is arranged on the upper surface of the sliding clamping block through a second annular frame, and a supporting frame is arranged on the rear side of the upper surface of the workbench. A sprayer is arranged on the lower surface