Semiconductor crystal bar growth tube device

The utility model provides a semiconductor crystal bar growth tube device which comprises a growth tube which is in a hollow cylinder shape, one end of the growth tube is a closed conical part, and the other end of the growth tube is open; the cover of the growth tube is used for closing the opening...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GAO WEI, ZHOU WENWAN, YOUNG MAURICE, SHI NING, XIAO YADONG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a semiconductor crystal bar growth tube device which comprises a growth tube which is in a hollow cylinder shape, one end of the growth tube is a closed conical part, and the other end of the growth tube is open; the cover of the growth tube is used for closing the opening of the growth tube; the heating and heat preservation component is arranged on the periphery of the growth tube; the heat removal jacket is arranged on the periphery of the heating and heat preservation component; the device is characterized in that an exhaust device is arranged near the upper part of the top end part of the heat removal jacket and is used for exhausting gas from the heat removal jacket. According to the semiconductor crystal bar growth tube equipment disclosed by the utility model, water can be prevented from being adopted as a cooling medium of the heat removal jacket, and gas can be adopted as the cooling medium; meanwhile, due to the adoption of the exhaust device which is specifically arrange