Semiconductor air exhaust system and semiconductor equipment

The utility model provides a semiconductor air exhaust system and semiconductor equipment, and relates to the technical field of semiconductor equipment. The semiconductor air extracting system comprises a coating cavity shell and an air extracting pump; the coating cavity shell is internally provided with at least one coating cavity body, the coating cavity shell is internally provided with an air exhaust channel, each coating cavity body is internally provided with a spraying head and a bearing piece used for lifting a wafer, and the air exhaust channel is connected with an air exhaust pump; a first air exhaust hole and a second air exhaust hole are formed in the side wall of each coating cavity shell, the first air exhaust holes and the second air exhaust holes are communicated with the air exhaust channel, the first air exhaust holes are located between the spraying heads and the bearing piece, and the second air exhaust holes are located below the bearing piece. The semiconductor equipment comprises the