Powder filter for diborane production

The utility model discloses a powder filter for diborane production, which comprises a protection box, the front surface of the protection box is fixedly connected with an air inlet pipe in a penetrating manner, the top of the protection box is fixedly connected with an exhaust pipe in a penetrating...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WU CHAONONG, ZHENG JINGWEI, JIANG MEIRUI, WANG QUNTAN, GONG SHIJIAN, LV QIAOLI, LIN ZHIJIAN, ZHU CHENTAO, CHEN GUOFU, WENG XINZENG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a powder filter for diborane production, which comprises a protection box, the front surface of the protection box is fixedly connected with an air inlet pipe in a penetrating manner, the top of the protection box is fixedly connected with an exhaust pipe in a penetrating manner, the middle part of the exhaust pipe is provided with a second electric control valve, and one end of the air inlet pipe in the protection box is fixedly provided with a tee joint; first connecting pipes are fixedly installed at the two ends of the tee joint, first electric control valves are arranged in the middles of the first connecting pipes, a lower shell is fixedly connected to the other ends of the first connecting pipes, and an upper shell is fixedly installed on the top of the lower shell. The electric control valve is controlled to reversely wash the filter screen for multiple times, and the dust collection bag is filled with powder, so that the service life of the filter screen is greatly prolong