Substrate processing apparatus

The utility model provides a substrate processing device. The substrate processing device comprises a substrate rotating part, an outer side cup-shaped body, an inner side cup-shaped body, an annular liquid discharging part and an exhaust passage, wherein the substrate rotating part is used for keeping a substrate and enabling the substrate to rotate. The outer cup-shaped body annularly covers the periphery of the substrate held by the substrate rotating part. The inner cup-shaped body is arranged on the inner side of the outer cup-shaped body and below the substrate. The annular liquid discharge portion is formed between the outer cup-shaped body and the inner cup-shaped body and discharges the processing liquid supplied to the substrate to the outside. The exhaust passage is formed on the inner side of the inner cup-shaped body. The inner cup-shaped body is provided with an exhaust hole which enables the liquid receiving space formed by the inner cup-shaped body and the outer cup-shaped body to be communica