Wafer swinging module in integrated wafer drying system

The utility model relates to a wafer swinging module in an integrated wafer drying system, the wafer swinging module comprises a mounting and fixing unit, a wafer box supporting unit and a moving unit, a lateral assembly and a bottom mounting plate in the mounting and fixing unit are used for fixing a main mounting plate on the outer wall of a process tank body; a combined reinforcing rib structural member in the wafer box supporting unit is connected with a wafer box horizontal fixing supporting rod and a vertical axial L-shaped wafer box fixing supporting rod, a wafer box bearing combined frame is fixed on the vertical axial L-shaped wafer box fixing supporting rod, and the front end of the wafer box horizontal fixing supporting rod is connected with the combined reinforcing rib structural member. The rear end is connected with the support rod; a driving motor and a moving slide rail in the moving unit are arranged on the main mounting plate; and a wheel pendulum shaft fixer is arranged on the moving slide