Ion device with adjustable spray needle

The utility model relates to the technical field of mass spectrometers, and discloses an ion device capable of adjusting a spray needle, which is provided with a position adjusting device, so that the position of the spray needle can be adjusted in a first direction and a second direction, the ion d...

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Hauptverfasser: OU JUNNIAN, YANG KAI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model relates to the technical field of mass spectrometers, and discloses an ion device capable of adjusting a spray needle, which is provided with a position adjusting device, so that the position of the spray needle can be adjusted in a first direction and a second direction, the ion device can adapt to processing points of different positions of a workpiece or a substrate, and the processing efficiency and the processing effect are improved. 本实用新型涉及质谱仪的技术领域,公开了一种可调节喷雾针的离子装置,通过设置位置调节装置,使得喷雾针可以在第一方向及第二方向上调节位置,可适应工件或衬底不同位置的加工点,提高加工效率及提升加工效果。