Electron beam emission mechanism for vacuum evaporation

The utility model discloses an electron beam emission mechanism for vacuum evaporation, and relates to the technical field of vacuum coating, and the emission mechanism comprises a lamp filament which can emit electrons after being electrified; the cover plate is provided with a containing groove us...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIANG YOUSONG, YANG YUN, WANG HUAIMIN, CAO XINSHENG, GU KANGXIN, ZHENG BINGWEI, CHENG XULI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses an electron beam emission mechanism for vacuum evaporation, and relates to the technical field of vacuum coating, and the emission mechanism comprises a lamp filament which can emit electrons after being electrified; the cover plate is provided with a containing groove used for containing the lamp filament, the containing groove is provided with a bottom face and an opening which are oppositely arranged, and side faces arranged between the bottom face and the opening in a surrounding mode; the projection of the outline of the opening on the plane where the bottom face is located is located outside the bottom face. The side surface comprises a first surface and a second surface which are oppositely arranged in a first direction and connected to a high-voltage cathode, and the first direction is parallel to the bottom surface; a first included angle is formed between the first surface and the bottom surface, a second included angle is formed between the second surface and the bottom