Component holding structure, cleaning, loading and unloading device, machine table and vibration brush

The utility model belongs to the technical field of micro-electronic product processing and manufacturing, and particularly relates to a component retaining structure, a cleaning and assembling and disassembling device, a machine table and a vibration brush. Compared with the prior art, the cleaning component embedded into the groove is adopted, so that the cleaning process of the component maintaining structure is more thorough, invasion of process residues to related devices and machines is reduced, damage of impurities or related falling objects in the hidden groove component to products is avoided, and the yield of workpieces or wafers is improved. 本实用新型属于微电子产品加工与制造技术领域，尤其涉及一种部件保持结构、清洗与装卸装置、机台及振动刷；采用了嵌入沟槽的清洁部件，使得部件保持结构的清洁过程更为彻底，进而使得相关装置、机台减少了工艺残留物的侵袭，避免了隐蔽沟槽部件中杂质或相关脱落物对产品的侵害，提升了工件或晶圆的良率。