Preparation device of high-purity trisilyl amine

The utility model provides a preparation device of high-purity trisilylamine, which belongs to the technical field of chemical engineering and comprises a low-temperature mixer, a four-in-one reactor and a rectifying tower group which are connected in sequence, the input end of the low-temperature mixer is communicated with an alkane solvent storage tank and a monochlorosilane storage tank; the four-in-one reactor comprises an intelligent temperature control unit for controlling the reaction temperature, a stirring unit for mechanically stirring a mixed material and liquid ammonia to obtain a reaction liquid, a heating unit for heating the reaction liquid under reduced pressure to obtain a volatile material and a residual material, and a closed filtering unit for filtering the residual material to form a filter cake; and a volatile material output end of the four-in-one reactor is communicated with the rectifying tower group through a condenser and a receiver. The method has the beneficial effects that the pr