Silicon wafer basket

The utility model discloses a silicon wafer lifting basket which comprises a base frame. The base frame is provided with a plurality of silicon wafer placing areas; each silicon wafer placing area is detachably connected with a silicon wafer placing basket. A connecting part is arranged in the middl...

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1. Verfasser: GAO BAOHUA
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The utility model discloses a silicon wafer lifting basket which comprises a base frame. The base frame is provided with a plurality of silicon wafer placing areas; each silicon wafer placing area is detachably connected with a silicon wafer placing basket. A connecting part is arranged in the middle of the base frame; a clamping part matched with cleaning equipment is fixed on the connecting part; and a lifting handle is arranged on the clamping part. According to the utility model, the plurality of silicon wafer placing areas are arranged on the base frame, more silicon wafer placing baskets can be placed, so that the placing quantity of silicon wafers is improved, and the clamping part matched with cleaning equipment is arranged, so that the silicon wafer lifting basket can be matched with the cleaning equipment for automatic cleaning, and the production efficiency is improved. 本实用新型公开了一种硅片提篮,包括基框;所述基框具有多个硅片放置区;每个硅片放置区上均可拆卸连接有硅片放置篮;所述基框的中部设有连接部;所述连接部上固定有与清洁设备配合的夹持部;所述夹持部上设有提手。本实用新型在基框上设置了多个硅片放置区,能够放置较多的硅片放