Pressure control device of semiconductor process equipment and semiconductor process equipment

The utility model provides a pressure control device of semiconductor process equipment and the semiconductor process equipment. A liquid discharging assembly in the pressure control device comprises a liquid inlet pipeline, a first liquid discharging pipeline, a liquid containing box and a liquid s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAN SHIQUAN, YUAN HECHUAN, CHEN JIANSHENG, FANG YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS,IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KINDOF FURNACE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FURNACES HEATING KILNS LIGHTING MECHANICAL ENGINEERING OVENS RETORTS SEMICONDUCTOR DEVICES WEAPONS
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