Pressure control device of semiconductor process equipment and semiconductor process equipment

The utility model provides a pressure control device of semiconductor process equipment and the semiconductor process equipment. A liquid discharging assembly in the pressure control device comprises a liquid inlet pipeline, a first liquid discharging pipeline, a liquid containing box and a liquid supplementing pipeline. Wherein the liquid inlet pipeline is used for communicating the gas-liquid separation assembly with the liquid containing box; the first liquid discharging pipeline is used for communicating the liquid containing box with a factory liquid discharging pipeline; the liquid outlet end of the liquid inlet pipeline and the liquid inlet end of the first liquid discharge pipeline extend into the liquid containing box, and the height of the liquid outlet end of the liquid inlet pipeline in the liquid containing box is lower than the height of the liquid inlet end of the first liquid discharge pipeline in the liquid containing box; the liquid supplementing pipeline communicates with the liquid contain